| Element Size | Flow Rate 流量 (NM³/Min) |
| K009 | 0.5 |
| K017 | 1.0 |
| K030 | 3.6 |
| K058 | 4.8 |
| K145 | 8.7 |
| K220 | 13.2 |
| K330 | 20.0 |
| K430 | 24.0 |
| K620 | 40.0 |
| 等 級 | PF Coarse Prefilter |
AO, AR Dust Filter |
AA, AX, AAR High Efficiency Filter |
ACS Vapor Removal Filter |
||
| 材 質 | Pleated Cellulose | Pleated Borosilicate | Pleated Borosilicate | Activated Carbon | ||
| 精 度 | 25 μm | 1 μm | 0.01 μm | N/A | ||
| 油份殘留量 | N/A | 0.5 mg/m³ | 0.01 mg/m³ | 0.003mg/m³ | ||
| 最大操作溫度 | 120℃ (248˚F) |
120℃ (248˚F) |
120℃ (248˚F) |
35℃(95˚F) | ||
| O-ring | Buna-N, Viton | |||||
| 中柱材質 | SUS304 | |||||
| 端蓋材質 | Aluminum | |||||